NOC:Thin Film Technology

Lecture 1 - General Introduction

Lecture 2 - Thin Film Materials and Components

Lecture 3 - Semiconductor Films and Heterostructures

Lecture 4 - Chemical Methods

Lecture 5 - Physical Vapor Deposition (PVD) : Thermal Evaporation

Lecture 6 - Thermal Evaporation

Lecture 7 - Sources of Thermal Evaporation

Lecture 8 - Evaporation of Elements and Compounds

Lecture 9 - Compound Evaporation and Thickness Uniformity

Lecture 10 - Film Thickness Monitoring and Control

Lecture 11 - Pulsed Laser Deposition

Lecture 12 - Sputtering Process and Mechanism

Lecture 13 - Plasma Discharge and DC Sputtering

Lecture 14 - RF Sputtering Process

Lecture 15 - Magnetron Sputtering

Lecture 16 - Sputtering of Binary Alloys and Compounds

Lecture 17 - Ion Beam and Hybrid Deposition

Lecture 18 - Introduction to CVD Process

Lecture 19 - Thermal CVD Process

Lecture 20 - Gas Transport and Growth Kinetics

Lecture 21 - CVD Processes and Systems

Lecture 22 - Plasma Enhanced CVD (PECVD)

Lecture 23 - Liquid Phase Epitaxy

Lecture 24 - Vapor Phase Epitaxy - Compound Semiconductors

Lecture 25 - Metal-Organic CVD (MOCVD)

Lecture 26 - Introduction and Film Purity

Lecture 27 - MBE System and Growth Mechanism

Lecture 28 - Effusion Source and Growth Rate

Lecture 29 - Insitu Growth Monitoring - RHEED Oscillation

Lecture 30 - Atomic Layer Deposition / Atomic Layer Epitaxy

Lecture 31 - Thin Film Growth Modes

Lecture 32 - Homogeneous Nucleation

Lecture 33 - Heterogenous Nucleation

Lecture 34 - Stranski-Krastanov (2D-3D) Growth Mode

Lecture 35 - SiGe Strained Layer Epitaxy (2D) and Ge Islands (3D)

Lecture 36 - Thickness Measurement

Lecture 37 - Thickness Measurement - Interference Method

Lecture 38 - Thickness and Optical Constants - Ellipsometry

Lecture 39 - Mechanical Properties - Film Porosity and Adhesion

Lecture 40 - Mechanical Properties – Residual Stress

Lecture 41 - Electron Beam Techniques - SEM

Lecture 42 - Scanning Electron Microscopy

Lecture 43 - Microprobe and Transmission Electron Microscopy

Lecture 44 - Transmission Electron Microscopy

Lecture 45 - Scanning Probe Microscopy

Lecture 46 - X-ray Photoelectron Spectroscopy

Lecture 47 - Auger Electron Spectroscopy

Lecture 48 - Secondary Ion Mass Spectrometry (SIMS)

Lecture 49 - Different SIMS Techniques and Depth Profile Analysis

Lecture 50 - Rutherford Backscattering Spectrometry (RBS)

Lecture 51 - Basic Device Fabrication Techniques

Lecture 52 - Metal-Oxide-Semiconductor (MOS) Capacitor

Lecture 53 - n-MOSFET and CMOS FET Devices

Lecture 54 - Scaled Si MOSFET Devices

Lecture 55 - Heterostructure FET and Bipolar Transistors

Lecture 56 - Optoelectronic Materials and Devices

Lecture 57 - Light Emitting Devices

Lecture 58 - Photodetector Devices

Lecture 59 - Photovoltaic Devices

Lecture 60 - Nanotechnology and Photonic Devices