NOC:Fundamentals of Micro and Nanofabrication

Lecture 1 - Introduction

Lecture 2 - Substrate

Lecture 3 - Substrate (Continued...)

Lecture 4 - Introduction to cleanroom

Lecture 5 - Contamination and surface cleaning

Lecture 6 - Advanced cleaning techniques

Lecture 7 - Defects

Lecture 8 - Diffusion

Lecture 9 - Diffusion - Advanced Concepts

Lecture 10 - Ion Implantation

Lecture 11 - Ion Implantation (Continued...)

Lecture 12 - Native Films

Lecture 13 - Native Films: Advanced Concepts

Lecture 14 - Native Films: Defects at Si/SiO2 interface

Lecture 15 - Methods and Some Definitions

Lecture 16 - Chemical Vapor Depostion: Basics

Lecture 17 - Chemical Vapor Depostion: Precursor Transport

Lecture 18 - Chemical Vapor Depostion: Types of CVD Equipment

Lecture 19 - Chemical Vapor Depostion: Nucleation and Growth

Lecture 20 - Chemical Vapor Depostion: Other Details

Lecture 21 - Atomic Layer Depostion

Lecture 22 - Atomic Layer Depostion (Continued...)

Lecture 23 - Physical Vapor Deposition: Basics

Lecture 24 - Physical Vapor Deposition: Evaporation

Lecture 25 - Physical Vapor Deposition: Sputtering

Lecture 26 - Mettalization: Contact resistance

Lecture 27 - Mettalization: Electromigration and Epilogue

Lecture 28 - Pattern Transfer Bascis

Lecture 29 - Optical lithography basics: resist process - 1

Lecture 30 - Optical lithography basics: resist process - 2

Lecture 31 - Optical Lithography: Contact and Proximity printing

Lecture 32 - Optical Lithography: Stepper and Scanner

Lecture 33 - Projection Lithography: Image formation basics

Lecture 34 - Projection Lithography: Image formation in photoresist

Lecture 35 - Optical lithography: Surface Reflection

Lecture 36 - Optical Lithography: Mask Technology

Lecture 37 - Lithography process technology glossary

Lecture 38 - Optical Lithography: Resolution enhancement

Lecture 39 - Electron beam lithography: Basics

Lecture 40 - Electron beam lithography: Resist process

Lecture 41 - Emerging lithography techniques

Lecture 42 - Etching Figures of Merit

Lecture 43 - Wet etching Basics

Lecture 44 - Wet Ething Recipes

Lecture 45 - Wet Ething Recipes

Lecture 46 - Dry etch: Plasma Basics

Lecture 47 - Dry etch: Plasma etching basics

Lecture 48 - Dry etch: Plasma tool configuration

Lecture 49 - Dry etch: Etch mechanism

Lecture 50 - Dry etch: Etch chemistry

Lecture 51 - Chemical Mechanical Polishing (CMP): Basics

Lecture 52 - Chemical Mechanical Polishing (CMP): Tool and process

Lecture 53 - Design for Manufacturability - 1

Lecture 54 - Design for Manufacturability - 2

Lecture 55 - Design for Manufacturability: Case study

Lecture 56 - Process integration

Lecture 57 - PV integration

Lecture 58 - CMOS integration

Lecture 59 - Lab demo: Silicon Nitride cantilever fabrication - 1

Lecture 60 - Lab demo: Silicon Nitride cantilever fabrication - 2

Lecture 61 - CMOS process for photonics application